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Cleanroom Standards

Federal Standard 209 is a document which mainly gives information on the airborne particle limits that are required to specify the airborne quality of cleanrooms.
It also gives the methods used to check what concentrations are present. It does not give any information on how a cleanroom should be operated. This information had been included in a series of Recommended Practices which are written by the same Institute as has written the Federal Standard 209, namely the Institute of Environmental Sciences. Some of the RP's which are of particular interest to those who test and run cleanrooms are discussed later in this document.
Cleanrooms are classified by the cleanliness of their air. The method most easily understood and universally applied is the one suggested in the earlier versions (A to D) of Federal Standard 209 in which the number of particles equal to and greater than 0.5 m m is measured in one cubic foot of air and this count is used to classify the room. The most recent 209E version has accepted a metric nomenclature.

US FED STD 209E is the most widely used standard in the world.


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